ECCI Defect Image Simulations

ECCI defect image simulations

The EMECCI program allows for the computation of electron channeling contrast images for arbitrary user-defined configurations of near-surface defects. These simulations are carried out for a scanning electron microscope (SEM) geometry and require quite a few input parameters. In this document, we describe all parameters that are specific to the ECCI case; foil/sample geometry is common to both TEM and SEM, as are defect definitions, so we describe those parameters in a separate wiki page (xxx).